ULTRASONIC MICRO/NANO MANIPULATIONS

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1 ULTRASONIC MICRO/NANO MANIPULATIONS Principles and Examples

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3 ULTRASONIC MICRO/NANO MANIPULATIONS Principles and Examples Junhui Hu Nanjing University of Aeronautics and Astronautics, China NEW JERSEY LONDON SINGAPORE BEIJING SHANGHAI HONG KONG TAIPEI CHENNAI

4 Published by World Scientific Publishing Co. Pte. Ltd. 5 Toh Tuck Link, Singapore USA office: 27 Warren Street, Suite , Hackensack, NJ UK office: 57 Shelton Street, Covent Garden, London WC2H 9HE British Library Cataloguing-in-Publication Data A catalogue record for this book is available from the British Library. ULTRASONIC MICRO/NANO MANIPULATIONS Principles and Examples Copyright 2014 by World Scientific Publishing Co. Pte. Ltd. All rights reserved. This book, or parts thereof, may not be reproduced in any form or by any means, electronic or mechanical, including photocopying, recording or any information storage and retrieval system now known or to be invented, without written permission from the publisher. For photocopying of material in this volume, please pay a copying fee through the Copyright Clearance Center, Inc., 222 Rosewood Drive, Danvers, MA 01923, USA. In this case permission to photocopy is not required from the publisher. ISBN Printed in Singapore

5 Preface This book is designed for the scientists, engineers, students and research project managers who are engaging in the research and development in ultrasonic manipulation technology or are interested in this technology. It gives the basic physical principles of ultrasonic micro/nano manipulations, and detailed methods of implementing these principles. Lots of examples are given in this book, to help the readers better understand the applications of these principles and characteristics of ultrasonic manipulators utilizing these principles. Demands for high-performance micro/nano manipulations, which come from the manufacture of microelectronic and photonic devices, biomedical apparatus, nanoscience and nanotechnology, renewable energy, environment protection, high-end appliances, etc. have been rapidly increasing in recent years. However, there are very few books on ultrasonic manipulation technology, which is one of the important means in micro/nano manipulations. I hope that this book would make a contribution to the development and application of micro/nano manipulation technology. This book consists of seven chapters. Chapter 1 is on the diversity of required actuation functions, and generalities of ultrasonic micro/nano manipulations. Chapter 2 is on the physics in ultrasonic micro/nano manipulations whereas Chapters 3-6 give examples of how to implement these principles and characteristics of the devices. In Chapter 3, examples of ultrasonic contact and noncontact type trapping of micro solids are given and discussed. In Chapter 4, examples of ultrasonic extraction, driving and removal of micro solid are given and discussed. In Chapter 5, examples of ultrasonic manipulations of nanoscale entities are given and discussed. In Chapter 6, examples of ultrasonic v

6 vi Preface microfluidic manipulations are given and discussed. The examples given in Chapters 3-6 come from the work which my research group did in the past 10 years. In Chapter 7, I give concluding remarks for the principles and examples listed in this book, which includes the position of ultrasonic micro/nano manipulation in ultrasonic technology, manipulation functions provided by this technology, features and limitations of this technology, and big academic and technological challenges which we are facing in the development of this technology. Although this book involves the MEMS based acoustic manipulation little, the physical principles, demonstrated in this book, can also be applied in the MEMS based acoustic manipulation. Many outstanding scientists contributed greatly to the physical principles of ultrasonic micro/nano manipulations, design and fabrication of the devices based on these physical principles, and modeling, characterization and optimization of these devices. Due to the limited topic number in this book, only the work by some of them, which is relevant to the topics, is cited. However, the work of the others is equally important to micro/nano manipulation technology. I would like to thank my students for their contributions and efforts to the research work described in the examples. They are Mr. Armand Kertoputro Santoso, Dr. Yanyan Liu, Dr. Satyanarayan Bhuyan, Dr. Jinlong Du, Dr. Jianbo Yang, Ms. Jun Xu, Ms. Chiaolin Tay, Ms. Yanmin Cai, Mr. Chinlee Tan, Mr. Wenyao Hu, Ms. Libin Ong, Mr. Changhan Yeo, Ms. Xueyi. Zhang, Mr. Y. Zheng, Mr. Zhi Wen Tan, Ms. Su Gui Gisela Teo, Mr. Ning Li, Mr. Yujie Zhou, Mr. Xiaobo Zhu, Mr. Huaqing Li, Mr. Xiaolong Lu, and Mr. Qi Zhang. Also, I should like to thank Prof. Yongxiao Chen, Prof. Yoshiro Tomikawa, Prof. Kentaro Nakamura, Prof. Tieying Zhou, Prof. Chunsheng Zhao and many other peers, for their kind support and invaluable advice in my academic career. Finally, I would like to express my gratitude to Dr. Hanmin Peng who also contributed to the production of this book, and my wife Qun Yue for her understanding and support. Junhui Hu

7 Foreword The book Ultrasonic Micro/Nano Manipulations appears just in time. It is filling a gap in the currently available review literature in this emerging subject area. It is dealing with interactions between ultrasonic fields and particles in suspensions, whereby the particles may be solid, soft, liquid, bubbles or even biological cells, while as dispersion medium water is primarily used. In the early 1990s the particles in an ultrasonic field research was founded by late Prof. Terence Coakley, Univ. Cardiff, UK, and was than around the year 2000 strongly promoted by a large and very successful European Marie Curie network entitled Ultrasonic Separation of Suspended Particles that was funded by the European Commission and was coordinated by the author of this foreword. From the involved different groups several key researchers emerged like Stefan Radel, Jeremy Hawkes, Martyn Hill, which further pushed forward the development of acoustic bio-cell filters, analytical devices and miniaturization of acoustic-field/flow devices, and built the kernel of numerous dedicated special sessions at all major scientific congresses covering ultrasound applications. Currently, the most recognized contributions to acoustic-field/flow experiments come from Profs. Thomas Lemell, Lund University, and Martin Wiklund, KTH Stockholm, with focus on ultrasonic standing wave manipulation in combination with Lab on a Chip technology and micro-analytics, as well as from Prof. Duval, ETH Zürich, with emphasis on general micro-particle manipulation. However, while the mentioned key researchers merely utilize ultrasonic standing waves, for which acoustic streaming is rather an unwanted and disturbing effect, the author of the current work, Prof. Junhui Hu, is uniquely focusing on acoustic streaming as useful phenomenon for manipulating micro/nano particles. vii

8 viii Foreword This book deals with very diverse concepts of using ultrasound for micro/nano particle manipulation, but the treatment always follows the same structure and systematically demonstrates the principles and feasible device concepts, which can be used to realize those various particle manipulation tasks. Therefore the content is, although comprehensive, described in a compact form and helps readers to understand the potential applications of the principles and characteristics of ultrasonic manipulators. I am convinced that this volume will strongly promote the development and application of micro/nano manipulation technology and will trigger research and development towards many of the numerous fascinating potential applications. This book is indispensible for all students and scientists that are already working in this emerging field or are interested to join in. In this sense, I wish the author and his readers many future editions of this book and successful developments of new breath-taking particle manipulating devices, respectively. Prof. Dr. Ewald Benes Secretary General and former President and Chairman of the International Congress on Ultrasonics Vienna University of Technology, Institute of Applied Physics

9 Contents Preface Foreword Chapter 1 Introduction Diversity of Actuation Generalities of Ultrasonic Micro/Nano Manipulations 4 References 7 Chapter 2 Physics in Ultrasonic Micro/Nano Manipulations Piezoelectric Transduction Acoustic Field and Energy Density Acoustic Radiation Force Acoustic Streaming Frictional Driving Chladni Effect Acoustic Cavitation and Bjerknes Forces Sound Induced Intermolecular Force Change Summary and Remarks 41 References 41 v vii Chapter 3 Ultrasonic Trapping of Micro Solids On a Radiation Point On a Radiation Line On a Radiation Face shaped Ultrasonic Tweezers Summary and Remarks 94 References 94 ix

10 x Contents Chapter 4 Ultrasonic Extraction, Driving and Removal of Micro Solids Particle Extraction Spin Driving of Particles Rotary Driving of Small Mechanical components Dust Removal for Photovoltaic Panels Summary and Remarks 147 References 147 Chapter 5 Ultrasonic Manipulations of Nanoscale Entities Contact Type Trapping and 3D Transfer of a Single Nanowire Noncontact Type Trapping and 2D Transfer of a Single Nanowire Controlled Rotary Driving of a Single Nanowire Concentration and Alignment of Nanoscale Entities Summary and Remarks 194 References 194 Chapter 6 Ultrasonic Microfluidic Manipulations Lobed Pattern in a Film of Suspension Adsorption and Extraction of Droplets without a Chamber Microfluidic Transportation in and Droplet Generation on a Twisted Bundle of Metal Wires Droplet Generation and Rotary Driving with an Ultrasonic Hollow Needle Merging of Microdroplets Summary and Remarks 246 References 247 Chapter 7 Concluding Remarks 249 Index 253