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Material Safety Data Sheet 1. PRODUCT AND COMPANY IDENTIFICATION CIRCUPOSIT(TM) CONDITIONER NEUTRALIZER 3320 Revision date: 01/03/2007 Supplier Rohm and Haas Electronic Materials LLC 455 Forest Street Marlborough, MA 01752 United States of America For non-emergency information contact: 508-481-7950 Emergency telephone number Chemtrec 800-424-9300 Rohm and Haas Emergency 215-592-3000 2. COMPOSITION/INFORMATION ON INGREDIENTS Component CAS-No. Concentration Water 7732-18-5 > 50.0 % p-toluenesulfonic acid 104-15-4 < 10.0 % Sulfuric acid 7664-93-9 < 10.0 % Non-ionic surfactant < 5.0 % Glycolic acid 79-14-1 < 20.0 % Isopropyl alcohol 67-63-0 < 2.0 % Ammonium salts < 10.0 % 3. HAZARDS IDENTIFICATION Emergency Overview Appearance Form Colour Odour liquid light yellow sweet Page 1 of 8 Revision date 01/03/2007

Hazard Summary WARNING! Acidic liquid and vapor. Causes skin, eye, and respiratory tract irritation. Prolonged, repeated contact, inhalation, ingestion, or absorption through the skin, may cause adverse effects to internal organ systems. Potential Health Effects Primary Routes of Entry: Inhalation, ingestion, eye and skin contact, absorption. Eyes: May cause pain, transient irritation and superficial corneal effects. Skin: Material may cause irritation. Prolonged or repeated exposure may have the following effects: drowsiness defatting and drying of the skin which can lead to irritation and dermatitis central nervous system depression kidney damage liver damage Ingestion: Swallowing may have the following effects: irritation of mouth, throat and digestive tract headache nausea Vomiting Repeated doses may have the following effects: central nervous system depression liver damage kidney damage Inhalation: Inhalation may have the following effects: irritation of nose, throat and respiratory tract Higher concentrations may have the following effects: systemic effects similar to those resulting from ingestion Target Organs: Eye Respiratory System nervous system Liver Kidney Skin Carcinogenicity Sulfuric acid NTP CARC Known carcinogen. Sulfuric acid ACGIH Suspected human carcinogen. Sulfuric acid US CA CRT Carcinogenic. Sulfuric acid IARC Human carcinogen. Isopropyl alcohol ACGIH Not classifiable as a human carcinogen. Isopropyl alcohol IARC Classification not possible from current data. Page 2 of 8 Revision date 01/03/2007

4. FIRST AID MEASURES Inhalation: Remove from exposure. If there is difficulty in breathing, give oxygen. Seek medical attention if symptoms persist. Skin contact: Wash skin with water. Continue washing for at least 15 minutes. Obtain medical attention if blistering occurs or redness persists. Eye contact: Immediately flush the eye with plenty of water for at least 15 minutes, holding the eye open. Obtain medical attention if soreness or redness persists. Ingestion: Wash out mouth with water. Have victim drink 1-3 glasses of water to dilute stomach contents. Immediate medical attention is required. Never administer anything by mouth if a victim is losing conciousness, is unconcious or is convulsing. Notes to physician Treat symptomatically. 5. FIRE-FIGHTING MEASURES Flash point Suitable extinguishing media: not applicable Not readily combustible. Select extinguishing agent appropriate to other materials involved. Specific hazards during fire fighting: No specific measures necessary. Special protective equipment for fire-fighters: Wear full protective clothing and self-contained breathing apparatus. Further information: This product may give rise to hazardous vapors in a fire. 6. ACCIDENTAL RELEASE MEASURES Personal precautions Wear suitable protective clothing. Environmental precautions Prevent the material from entering drains or water courses. Do not discharge directly to a water source. Advise Authorities if spillage has entered watercourse or sewer or has contaminated soil or vegetation. Methods for cleaning up Cover with absorbent or contain. Collect and dispose. 7. HANDLING AND STORAGE Handling Use only in well-ventilated areas. Avoid breathing vapor. Avoid contact with eyes, skin and clothing. Keep container tightly closed. Page 3 of 8 Revision date 01/03/2007

Further information on storage conditions: No special precautions necessary. Storage Storage conditions: Store in original container. Storage area should be: cool dry well ventilated out of direct sunlight away from incompatible materials 8. EXPOSURE CONTROLS / PERSONAL PROTECTION Exposure limit(s) Exposure limits are listed below, if they exist. Component Regulation Type of listing Value p-toluenesulfonic acid Rohm and Haas TWA 1 mg/m3 Rohm and Haas STEL 2 mg/m3 Component Regulation Type of listing Value Sulfuric acid Rohm and Haas TWA Inhalable 0.2 mg/m3 Rohm and Haas STEL OSHA_TRANS PEL 1 mg/m3 ACGIHLIS_P TWA Thoracic 0.2 mg/m3 fraction. ACGIH TWA Thoracic fraction. 0.2 mg/m3 Component Regulation Type of listing Value Isopropyl alcohol OSHA_TRANS PEL 980 mg/m3 400 ppm Z1A TWA 980 mg/m3 400 ppm Z1A STEL 1,225 mg/m3 500 ppm Rohm and Haas TWA 150 ppm Rohm and Haas STEL 300 ppm ACGIH ACGIHLIS_P STEL 400 ppm ACGIHLIS_P ACGIH TWA 200 ppm ACGIH STEL 400 ppm Eye protection: Chemical goggles or safety glasses Hand protection: Neoprene gloves. Other chemical resistant gloves may be recommended by your safety professional. Skin and body protection: Normal work wear. Respiratory protection: No personal respiratory protective equipment normally required. The specific respirator selected must be based on the airborne concentration found in the workplace and must not exceed the working limits of the respirator. Engineering measures: Engineering methods to prevent or control exposure are preferred. Methods include process or personnel enclosure, mechanical ventilation (local exhaust), and control of process conditions. Page 4 of 8 Revision date 01/03/2007

9. PHYSICAL AND CHEMICAL PROPERTIES Appearance Form liquid Colour light yellow Odour sweet ph < 2 Boiling point/range > 100 C ( > 212 F) Flash point not applicable Component: Glycolic acid Vapour pressure Vapour pressure 1.0798 kpa at 80 C (176 F) 32.0 mmhg at 20 C (68 F) Vapour pressure 6.0527 kpa at 25 C (77 F) Relative vapour density not applicable Water solubility Miscible Relative density 1.10 Evaporation rate not applicable VOC's 15.2 g/l NOTE: The physical data presented above are typical values and should not be construed as a specification. 10. STABILITY AND REACTIVITY Hazardous reactions Stable under normal conditions. Conditions to avoid Materials to avoid Hazardous decomposition products contact with incompatible materials alkalines Cyanides Reducing agents Oxidizing agents Combustible organic materials None known., 11. TOXICOLOGICAL INFORMATION Toxicological information on this product or its components appear in this section when such data is available. Component: p-toluenesulfonic acid Acute oral toxicity LD50 rat 2,480 mg/kg Component: Sulfuric acid Acute oral toxicity LD50 rat 2,140 mg/kg Page 5 of 8 Revision date 01/03/2007

Component: Non-ionic surfactant Acute oral toxicity LD50 rat 700 mg/kg Component: Glycolic acid Acute oral toxicity LD50 rat 4,240 mg/kg Acute oral toxicity LD50 rat 5,045 mg/kg Component: Non-ionic surfactant Acute inhalation toxicity LC50 rat > 21.5 mg/l Acute inhalation toxicity LC50 rat 16,000 mg/m3 Component: Non-ionic surfactant Acute dermal toxicity LD50 rabbit 12,000 mg/kg Acute dermal toxicity LD50 rabbit 12,800 mg/kg Component: Sulfuric acid Skin irritation Component: Sulfuric acid Eye irritation Corrosive Corrosive Component: Non-ionic surfactant Eye irritation rabbit Severe eye irritation Component: Glycolic acid Toxicity to reproduction Experimental studies in animals have provided some evidence of embryo/fetotoxicity and birth defects only at doses producing marked maternal toxicity. Toxicity to reproduction No observed adverse effect level for such effect(s) is 100-500 mg/kg body weight Mutagenicity Chinese hamster ovary cells 12. ECOLOGICAL INFORMATION Ecotoxicological information on this product or its components appear in this section when such data is available. p-toluenesulfonic acid Ecotoxicity effects Toxicity to fish LC50 Fathead minnow (Pimephales promelas) 96 h 100 mg/l Sulfuric acid Ecotoxicity effects Page 6 of 8 Revision date 01/03/2007

Toxicity to fish TLm Mosquito fish (Gambusia affinis) 48 h 48 mg/l Glycolic acid Ecotoxicity effects Toxicity to fish Toxicity to fish LC50 Bluegill sunfish 48 h 93 mg/l LC50 Fathead minnow (Pimephales promelas) 96 h 164 mg/l Isopropyl alcohol Ecotoxicity effects Toxicity to algae Toxicity to aquatic invertebrates EC50 Algae 96 h >1,000 mg/l EC50 Daphnia magna 48 h 13,299 mg/l 13. DISPOSAL CONSIDERATIONS Environmental precautions: Prevent the material from entering drains or water courses. Do not discharge directly to a water source. Advise Authorities if spillage has entered watercourse or sewer or has contaminated soil or vegetation. Disposal Dispose in accordance with all local, state (provincial), and federal regulations. Under RCRA, it is the responsibility of the product's user to determine at the time of disposal, whether the product meets RCRA criteria for hazardous waste. This is because the product uses, transformations, mixtures, processes, etc. may render the resulting materials hazardous. Do not remove label until container is thoroughly cleaned. Empty containers may contain hazardous residues. This material and its container must be disposed of in a safe way. 14. TRANSPORT INFORMATION DOT IMO/IMDG Not regulated for transport Not regulated (Not dangerous for transport) Transportation classifications may vary by container volume and may be influenced by regional or country variations in regulations 15. REGULATORY INFORMATION SARA TITLE III: Section 311/312 Categorizations (40CFR370): Immediate health hazard Delayed (chronic) Health Hazard Page 7 of 8 Revision date 01/03/2007

SARA TITLE III: Section 313 Information (40CFR372) This product contains a chemical which is listed in Section 313 at or above de minimis concentrations. SARA Title III Components: Aqueous Ammonia from Water Dissociable Ammonium Salts US. Toxic Substances Control Act (TSCA) Section 12(b) Export Notification (40 CFR 707, Subpt D): US. Toxic Substances Control Act (TSCA) Section 12(b) Export Notification (40 CFR 707, Subpt D) This product does not contain any substances subject to Section 12(b) export notification. US. Toxic Substances Control Act (TSCA) All components of this product are in compliance with the inventory listing requirements of the U.S. Toxic Substances Control Act (TSCA) Chemical Substance Inventory. California (Proposition 65) This product does not contain materials which the State of California has found to cause cancer, birth defects or other reproductive harm. 16. OTHER INFORMATION Hazard Rating Health Fire Reactivity NFPA 2 0 0 Legend ACGIH BAc OSHA PEL STEL TLV TWA American Conference of Governmental Industrial Hygienists Butyl acetate Occupational Safety and Health Administration Permissible Exposure Limit Short Term Exposure Limit (STEL): Threshold Limit Value Time Weighted Average (TWA): Bar denotes a revision from prior MSDS. The information provided in this Safety Data Sheet is correct to the best of our knowledge, information and belief at the date of its publication. The information given is designed only as a guidance for safe handling, use, processing, storage, transportation, disposal and release and is not to be considered a warranty or quality specification. The information relates only to the specific material designated and may not be valid for such material used in combination with any other materials or in any process, unless specified in the text. Version: 2.0 Print Date: 01/31/2011 Layout 296864 Page 8 of 8 Revision date 01/03/2007