Digital Micromirror Device Reliability and Failure Mechanisms

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1 Digital Micromirror Device Reliability and Failure Mechanisms Michael R. Douglass Distinguished Member of the Technical Staff Texas Instruments Plano, Texas TRC: Oct 25-27, 2004

2 DMD Reliability and Failure Mechanisms Topics Introduction FMEA approach -- Identify potential risks Verification and performance demonstration Research Opportunities Summary 12/15/2004 j://stdpres/template.pot Slide 2

3 DMD Mirror Bias and Reset Voltage Mirror Yoke and Hinges Address (Logic) Voltage Address Electrodes and Landing Surface SRAM 12/15/2004 j://stdpres/template.pot Slide 3

4 Two DMD Mirrors - Landed 12/15/2004 j://stdpres/template.pot Slide 4

5 Top down view of tilted mirrors 12/15/2004 j://stdpres/template.pot Slide 5

A Few Facts About DMD MEMS Technology Number of mirrors 480,000 to >2,000,000 Mechanical motion Makes discrete contacts or landings Lifetime up to 100,000 hrs Address voltage 3.

6 A Few Facts About DMD MEMS Technology Number of mirrors 480,000 to >2,000,000 Mechanical motion Makes discrete contacts or landings Lifetime up to 100,000 hrs Address voltage 3.3-volt CMOS technology Mechanical elements Aluminum Package (Type A) Optical, hermetic, welded lid Process Low temperature, sputter deposition, plasma etch (standard SC processes) 12/15/2004 j://stdpres/template.pot Slide 6

7 DLP Board Digital Light Processing Processor Memory Projection Lens DMD Shaping Lens Optics Color Filter Condensing Lens Light Source Screen 12/15/2004 j://stdpres/template.pot Slide 7

DLP Overview Since 1996, over 3 million DLP- based display products have been shipped by over 50 different manufacturers DLP Front Projection now account for more than 1 out of every 3 projectors

8 DLP Overview Since 1996, over 3 million DLP- based display products have been shipped by over 50 different manufacturers DLP Front Projection now account for more than 1 out of every 3 projectors sold DLP TVs now selling in more than 5800 stores with more than 50 models expected in 2004 DLP Cinema now over 220 screens in 20 countries Capacity again more than doubled in 2004 with addition of Amkor and Anam capabilities 12/15/2004 j://stdpres/template.pot Slide 8

9 DMD Reliability and Failure Mechanisms Failure Modes and Effects Analysis (FMEA) How can a DMD fail? What is the root mechanism? Assess risk to lifetime, failure rate What tests can highlight the mechanism? Can we accelerate the mechanism? 12/15/2004 j://stdpres/template.pot Slide 9

10 DMD Reliability and Failure Mechanisms DMD Superstructure Hinge fatigue (do hinges break?) Hinge memory (limited life?) Nonfunctional (stuck) mirrors Shock and vibration failure Fully Qualified CMOS 12/15/2004 j://stdpres/template.pot Slide 10

11 DMD Reliability Verification FMEA Item #1 -- Hinge Fatigue Purpose Test Conditions Result Equivalent Lifetime Hinge Fatigue 1:1 Duty Cycle Accelerated 65 C > 3.67 Trillion Cycles > 69,000 hours > 250,000 hours* * Business projector application (1-chip, 8-bit) Assuming 1000 hours per year years of useful life Note: No hinge wearout time identified to-date 12/15/2004 j://stdpres/template.pot Slide 11

12 DMD Reliability Verification FMEA Item #3 Non-functional Mirrors Springtip design helps overcome surface adhesion 3249-C /15/2004 j://stdpres/template.pot Slide 12

13 DMD Reliability Verification FMEA Item #4 Shock and Vibration Storage Life Cold/Hot Temperature Cycle Thermal Shock -55/100C, no power -55/125C, air-to-air, fine/gross leak -55/125C, liquid-to-liquid 1000 hours 1000 cycles 200 cycles, 1000 cycles Sequence 1 Sequence g Mechanical Shock, Y only Vibration, 20g, Hz Constant Acceleration, 10Kg, Y1 only Thermal Shock, -55/125C Temperature Cycles, -55/+125C Moisture Resistance 15 cycles 100 cycles 10 days 12/15/2004 j://stdpres/template.pot Slide 13

14 DMD Reliability and Failure Mechanisms DMD Superstructure Hinge fatigue Hinge memory Nonfunctional (stuck) mirrors Shock and vibration failure Fully Qualified CMOS 12/15/2004 j://stdpres/template.pot Slide 14

15 DMD Reliability and Failure Mechanisms Opportunities for MEMS Reliability Research Properties of thin-films Surface effects of micro-/nano-structures Low-cost, reliable packaging techniques 12/15/2004 j://stdpres/template.pot Slide 15

16 Summary of DMD Reliability Hinge Memory Lifetime > 100,000 hours at normal operating conditions Random Defects > 650,000 hour MTBF (<1500 FIT) Hinge Fatigue Lifetime >3.67 Trillion Cycles or >250,000 hours Environmentally robust 12/15/2004 j://stdpres/template.pot Slide 16

INTERFACING TO THE DIGITAL MICROMIRROR DEVICE FOR HOME ENTERTAINMENT APPLICATIONS. Travis W. Migl

Proceedings of IPACK 01: The Pacific Rim/ASME International Electronic Packaging Technical Conference and Exhibition July 8-13, 2001, Kauai, Hawaii, USA IPACK2001-15712 INTERFACING TO THE DIGITAL MICROMIRROR