Bio Compatible Microsystem Packaging of VCSELaser for Implantable Devices
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1 Bio Compatible Microsystem Packaging of VCSELaser for Implantable Devices Dr Alexander Steinecker, CSEM, Alpnach (CH) EPoSS Annual Forum, Torino (IT),
2 Copyright 2014 CSEM Alexander Steinecker EPoSS Annual Forum, , VCSELs for Bio Implants Page 1
3 The miracle of hearing Copyright 2014 CSEM Alexander Steinecker EPoSS Annual Forum, , VCSELs for Bio Implants Page 2
4 Cochlear Implants a technical masterpiece Source: Copyright 2014 CSEM Alexander Steinecker EPoSS Annual Forum, , VCSELs for Bio Implants Page 3
5 Cochlear Implants Background Areas in cochlear correspond to acoustic frequency Degradation of sound transmission in the inner ear can be bridged high frequencies (> 10 khz) low frequencies (< 100 Hz) Copyright 2014 CSEM Alexander Steinecker EPoSS Annual Forum, , VCSELs for Bio Implants Page 4
6 Limitations of electrical stimulation Very sensitive localfrequency response within cochlear, mismatch acoustic vs. Electric hearing From one to four electrodes rapid improvement achieved, above 4 20 no detectable advantage Nerve Cell tissue damage due to direct high current stimulation density Source: Clark G. The multi-channel cochlear implant: past, present and future perspectives. Cochlear Implants Int. 2009;10 Suppl. 1:2-13 Poor spatial resolution with electric stimulation Copyright 2014 CSEM Alexander Steinecker EPoSS Annual Forum, , VCSELs for Bio Implants Page 5
7 Advantages ofopto acoustical stimulation Telecom VCSEL Laser pulses in water generate acoustic signals «Optophony» Spectral response enables high temporal and frequency selective stimulation Copyright 2014 CSEM Alexander Steinecker EPoSS Annual Forum, , VCSELs for Bio Implants Page 6
8 Project Reference EU STREP ICT EU Project STREP ICT FP7 ACTION ACTive Implant for Optoacoustic Natural sound enhancement Enhance hearing experience for severely impaired patients by eliminating limitations in spatial and temporal excitation of cochlear implants based on electrical stimulation Copyright 2014 CSEM Alexander Steinecker EPoSS Annual Forum, , VCSELs for Bio Implants Page 7
9 Overview of innovation areas in optical cochlear device Copyright 2014 CSEM Alexander Steinecker EPoSS Annual Forum, , VCSELs for Bio Implants Page 8
10 Key technology components for optical stimulation Copyright 2014 CSEM Alexander Steinecker EPoSS Annual Forum, , VCSELs for Bio Implants Page 9
11 Optical Cochlear Microsystem I Packaging Housing State of the art: Biocompatible housing materials Ti, Ta Drastic size reduction (<800µm dia), hermetic enclosure with low temperature sealing process (<250 C for few seconds) 1mm Transparency in IR range Copyright 2014 CSEM Alexander Steinecker EPoSS Annual Forum, , VCSELs for Bio Implants Page 10
12 Optical Cochlear Microsystem II Packaging Connections State of the art feedthrough 4mm width hermetic low temperature sealing with approved long term biocompatible materials (ceramics and highly biocompatible metals such as Nb, Pt, Ti) Copyright 2014 CSEM Alexander Steinecker EPoSS Annual Forum, , VCSELs for Bio Implants Page 11
13 Optical Cochlear Microsystem III Biocompatible Sapphire Lens Sapphire lens for high biocompatibility Plasma reactive ion etching (RIE ICP) only manufacturing option for micro optics in sapphire on Wafer Level Copyright 2014 CSEM Alexander Steinecker EPoSS Annual Forum, , VCSELs for Bio Implants Page 12
14 Optical Cochlear Microsystem IV VCSEL arrays Long wavelength VCSEL with superior performance for 1.3 μm< 2.3 μm Parameter Value Laser array 10 x 10 Wavelength nm Peak output power > 20 mw Operating range o C Drive current <30 ma optimized for maximum efficiency at human body temperature Copyright 2014 CSEM Alexander Steinecker EPoSS Annual Forum, , VCSELs for Bio Implants Page 13
15 Optical Cochlear Microsystem V Biocompatible flex circuit (ST Microelectronics/CSEM) Flex circuit Platinum, Niobium, Tantalum, Biocompatible polymers Highly flexible Chip on wire technology Chip integrated directly on wire High throughput Copyright 2014 CSEM Alexander Steinecker EPoSS Annual Forum, , VCSELs for Bio Implants Page 14
16 Leading edge European Medical device manufacturing Miniaturization Advanced Long Wavelenth VCSEL Laser Biocompatible Flexprint Low temperature biocompatible hermetic enclosure Biocompatible microlens at wafer scale Semiautomatic small scale packaging Copyright 2014 CSEM Alexander Steinecker EPoSS Annual Forum, , VCSELs for Bio Implants Page 15
17 Thanks to our cooperation partners and funding bodies! Reference: James, R.Jose, Low Temperature Hermetic Sealing for Implantable Medical Systems, 2010 R.Jose James, CSEM SA This project is supported by the EU Commission, the European Research Funding organisation under FP7 STREP ICT Program Grant No Copyright 2014 CSEM Alexander Steinecker EPoSS Annual Forum, , VCSELs for Bio Implants Page 16
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