SEMICON West Standards Meeting Schedule San Francisco Marriott Marquis and Moscone Center (North Hall), San Francisco, CA. Sunday, July 8, 2012
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1 and Moscone Center (North Hall), San Francisco, CA Sunday, July 8, 2012 NARSC Regulations (SC) -17:30 Informal Working Session for ISC Regulations -1 (15) JA NA Regional Standards Committee (NARSC) 1-21:00 (40) and Moscone Center (North Hall), San Francisco, CA Monday, July 9, 2012 ICRC (EHS Division) 0- (25) SB S2 Non-Ionizing Radiation - (20) S2 Chemical Exp. -15:30 S2 Interlock Reliab. 15:30-1 Mass Flow Filters & Purifiers 0- Materials of Construction Gas Delivery System - Gas Specifications - Pressure Measurement -1 Facilities & Gases F51(Perfluoroelastomer) Revision - Building Information Modeling (BIM) for Semi. Capital Equip -1 I & CC Leadership - (10) Process Control Systems (PCS) - I & CC GCS (By Invitation Only) 1-1 (5) GEM (35) Liquid Chemicals F104 Revision - (10) MT F31, F39 & F41 Revision - Determining Roughness of Polymer Surfaces - UPW Filtration /F63-1 /NEMS Wafer Bond Microfluidics / Microtube 0- Packaging - Termin ology - 11:30 MEM S Relia bility 11:30- (10) MT Materials Characterizatio n 13:30-14:30 / NEMS (C) 14:30-16:30 EMC 13:30-16:30 (5) MT
2 Microlithography Extreme Ultraviolet Fiducial Mark -1 (20) MT Int'l Reticle SMIF Pod and Load Port Interoperability - (30) MT EUV Reticle -1 (30) MT Int'l 450 mm Shipping Box -1 (30) MT Int'l Advanced Wafer Geometry 08:30- (By Invitation Only) GCS - (6) KN Int'l Si. Wafer Termin ology 13:30- Int'l Annealed Wafer - Int'l Epi Wafer - Int'l Polished Wafer -1 Regulations (SC) 0-0 (10) JA
3 and Moscone Center (North Hall), San Francisco, CA Tuesday, July 10, 2012 Three-Dimensional Stacked Integrated Circuits (3DS-IC) Inspection & Metrology 0- (30) Bonded Wafer Stacks - (30) Three-Dimensional Stacked Integrated Circuits (3DS-IC) (C) -1 (30) S23 Revision 0- S2 to Machinery Directive Mapping - S2 3.3 Limitations - Energy Conservation In Semiconductor Manufacturing (EHS Division) - (25) SB S2 Ladders & Steps - S8/Ergonomics -1 Facilities & Gases Heater Jacket Facilities & Gases (C) 0- (25) KN Diagnostic Data Acquisition (DDA) 0- (30) Sensor Actuator Bus - (25) Energy Saving Equipment Communication -1 (25) Discussion on Japan EISS TF Activity - (25) Liquid Chemicals F57 Discussion/ITRS Alignment 0- Analytical Methods - Liquid Chemicals (C) - (25) ESD / ESC 13:30-16:30 (5) MT Equipment Training and Documentation 0- (5) MT Joint CTM/PETM - (5) MT Microlithography Microlithography (C) 09:30-11:30 (20) MT Photovoltaic (Moscone Center, Lower North Hall Lobby, Room: 123) PV Minority Carrier Lifetime (25) KN Int'l PV Analytical Test Methods - (25) KN Global Maintenance (30) MT Int'l 450 mm Physical Interfaces & Carriers 0- (30) MT Int'l Process Module Physical Interface - (20) MT Int'l SOI 08:30-09:30 Int'l Test Methods 09:30-10:30 Int'l Advanced Surface Inspection 10:30- (20) KN Int'l 450 mm Wafer - (30) KN (C) -1 (25) KN ISC Audit & Review (SC) 0-0 (10) JA Standards Awards and Networking Event 1-19:30 (200)
4 and Moscone Center (North Hall), San Francisco, CA Wednesday, July 11, 2012 S13 Revision (JA TF) 0- Fail-safe Fault Tolerance Interest Group - EHS Leaders Meeting - S6 Revision - (20) Fire Protection - S22 (Electrical ) - Manufacturin g Equip (SC) 1-1 High Brightness LED HB-LED Equipment Automation (Hardware WG) 0-1 (C) 0-16:30 (15) Equipment RAMP 0- (5) MT (C) 13:30-1 (5) MT Photovoltaic (Moscone Center, Lower North Hall Lobby, Room: 123) PV Gases and Liquid Chemicals Purity PV Electrical & Optical Properties Measurement 0- PV/Photovoltaic Materials (C) - Int'l Reticle SMIF Pod and Load Port Interoperabili ty (30) MT Physical Interfaces & Carriers (C) 0- (30) MT Regulations (SC) 0-0 (10) JA Gotomeeting Training - Standards Technical Education Program (STEP): 450 mm Standards Overview -1
5 and Moscone Center (North Hall), San Francisco, CA Thursday, July 12, 2012 (C) 0-1 (50) High Brightness LED HB-LED Impurities & Defects HB-LED Wafer 0- HB-LED Equipment Automation (Software WG) - HB-LED (C) -1 Traceability Anti-Counterfeiting - (25) KN Traceability (C) -1 International Standards Committee (ISC) -1 (20) JA
SEMICON West Standards Meeting Schedule San Francisco Marriott Marquis and Moscone Center (North Hall), San Francisco, CA. Sunday, July 8, 2012
and Moscone Center (North Hall), San Francisco, CA 1 1 1 Sunday, July 8, 2012 NARSC Regulations -1 Informal Working Session for ISC Regulations (SC) -1 (15) JA NA Regional Standards Committee (NARSC) 1-21:00
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