Custom-Made Products / Scientific Research Instruments

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1 / Scientific Research Instruments Multipurpose X-Ray Diffractometer System For Laboratory Use Multipurpose X-ray diffractometer The instrument shown on the left is a multipurpose 4-axis X-ray diffractometer system. This instrument was manufactured to observe onthe-spot proteins grown in a gravity-free state and a samples grown in an electric furnace. For X-rays generated by an X-ray generator, energy resolution can be increased by means of a double/quadruple crystal monochromator. Also the sample goniometer stage can be changed by removing the stage depending on the measurement mode: protein measurement or on-the-spot observation. Also the mode can be switched between one-time reflection and three-time reflection before the analyzer crystal. This instrument is now in service at the National Aeronautics and Space Administration (NASA). Inside of monochorometor Detection analyzer unit Goniometer Type X-Ray Diffractometer The instrument shown on the left is a goniometer type X-ray diffractometer. For the sample goniometer, a rotation stage like an circle is not used, and rotation stages tilted by 45 are combined and mounted. Since there is no object that cuts off the X-rays, such as an circle, the degree of freedom for the angle of diffraction can be wide. For the -2 axes, a direct-coupling rotary encoder is used. The rotation center displacement of the three axes can be reduced to 10 m. This instrument is now in service at the Production Engineering Laboratory of HITACHI CO., Ltd. Neutron Diffraction Experiment Instruments Neutron scattering experiments are used for researching physical properties and structural analysis by using the characteristics of thermal neutrons extracted from an atomic reactor. We supply many diffractometers and positioning mechanisms to the Japan Atomic Energy Agency and High Energy Accelerator Research Organization. This instrument is now in service at the 6G port of JRR-3M of the Japan Atomic Energy Agency and consists of a monochromator, goniometer for sample positioning, analyzer shield, and neutron detector inside a green shield. The overall instrument is controlled by an external computer. (Example of integration) 310

2 Monochromator A neutron monochromator extracts neutrons with the energy required for an experiment from a neutron source in a wide energy range emitted from an atomic reactor. Pyrolytic Graphite (PG) is frequently used for extracting unpolarized neutrons and a Cu2MnAl Heusler crystal is used for extracting polarized neutrons. This instrument is a focusing type monochromator for polarized neutrons. For highintensity and monochrome polarized neutrons, a Cu2MnAl Heusler crystal is placed in a strong magnetic field of a samarium-cobalt magnet (Co5Sm) and a worm shaft and worm wheel is used to tilt the crystal symmetrically at a ratio of 1:2:3 with respect to the center so that focusing can be obtained by deflecting the horizontal light in a cylindrical shape. Analyzers A neutron analyzer extracts neutrons to be examined from neutrons with energy that are emitted from a sample. The principle is the same as the neutron monochromator. This instrument is a focusing type neutron analyzer. PG is used as the analyzer crystal. Like the neutron monochromator described above, the crystal is tilted symmetrically at a ratio of 1:2:3:4 with respect to the center so that focusing can be obtained by deflecting the overall light in a cylindrical shape. Heavy-Duty Goniometer Neutron diffraction experiments are performed under various extreme conditions. Since a sample is placed in a strong magnetic field, at an extremely low temperature, and under a high pressure, the sample goniometer itself must also withstand the load and conditions. We have developed and supplied many heavy-duty goniometers. This instrument consists of an XY translation stage for positioning the sample at the rotation center, and Rx and Ry tilt stages for adjusting the diffraction plane to a horizontal plane. A cryostat for high-load specification designs can also be mounted. This instrument is a goniometer for positioning a superconducting magnet that generates a strong magnetic field. For mounting a superconducting magnet, the stage is made of nonmagnetic material and the motors are covered with silicon steel plates. The instrument is designed to withstand loads of up to 300 kg. CONTACT TEL: FAX: [ ] info@kohzu.com [URL] 311

3 / Industrial Automation Instruments VKM-12 / VKM-26 Six-Axis Manipulator VKM-12 This instrument is a six-axis manipulator for adjusting positions at submicron precision when joining to a prism three LCD or CCD devices that are essential for manufacturing three-color LCD projectors or three-color CCD cameras. Adjustment is performed to maintain the performance of each single axis as well as the optimum precision and rigidity in the assembled state of the six axes, Since displacement caused by curing when UV bonding or soldering is performed is minimum and reproducibility is very high, high reliability is obtained even in mass production conditions. Axis Model Number Resolution Motion Range Maximum Speed X Y Z XA16A-R (Micro-step 40 division) 25mm 10mm / sec x SA07A-RT SA07A-RT 7.65 / sec y SA07A-RM SA07A-RM 10 6 / sec z RA D RA D 2 / sec yaxis SA07A-RM xaxis SA07A-RT Rotation Center 70 zaxis RA D 450 YAxis XA16A-R1 XAxis XA16A-R1 ZAxis XA16A-R1 210 For M6 tap screw

4 Three-Color LCD Panel Pasting Unit VKM-26 This system attaches three channel RGB LCD panels to an optical block using three six-axis manipulators. A test pattern for adjustment that is projected on the screen is captured by five CCD color cameras (four near the perimeter, one at the center), and the image is loaded into the frame memory inside the image processing unit. Image processing calculations are performed by the CPU for each camera and the positions of the LCD panels are automatically adjusted. Then the LCD panels are adhered to the optical block by UV bonding by means of a UV irradiator. Manipulator Mechanism Unit Appearance of Instruments Specifications Panel Size Irradiation Method Bonding Method Detection Accuracy Detection Method Adjustment Time Lens Method Panel Chuck other From 0.55 inch (Actual Showing at March,2004) Transmissive type or reflection type UV bonding or soldered joint Registration : 1/20 1/50 picture element degree Focus : 10 m Note : Depend on the User's condition, tact et al. Image processing method (Five point in total : Four point in corner and one point in center) About two minutes (exclusive of bonding time) Note : Depend on the User's condition, accuracy et al. Master lens method or product lens method Manual or motorized That is designed in optimal method by panel shape Each parameters can be set freely by user which includes bonding time, adjustment accuracy, field angle adjustment factor, offset adjustment factor et al. Inspection of complete product and that of data processing. Data transfer function to host-computer. CONTACT TEL: FAX: [ ] info@kohzu.com [URL] 313

5 / Industrial Automation Instruments PMA-3 / TKI Polygon Mirror Apex Angle Measurement Stage This positioning stage measures the apex angle of a polygon mirror. Although manual operation is required, this stage features a sensitive stage with rotation angle of 1 second or less. A two-axis oblique stage is used to compensate the plane tilt. A rotation stage, including a high-precision 1-arcsec reading rotary encoder, allows precise measurement of the vertical angle. Use of a coarse adjustment rotation mechanism and a fine adjustment mechanism (fine pitch positioner) enables smooth rotational movement in a narrow to a wide angle range. Model Number of Axis ST07A-S3T ST07A-S3M RM16A-B1-1B Coarse Motion Range Fine Motion Range Minimum Readout 1.26 (Scale) 0.97 (Scale) 1.15 (Scale) 1 (Counter) Load Stiffness Weight A 1-arcsec reading counter is provided Optional BCD output is possible 4-F 4-E 4-D rotation center A Z ST07A-S3T ST07A-S3M Fine Pitch Positioner FPP3-13 RM16A-B1-1B Rotary encoder Size Depth A 5H7 7 D 30 M3 6 E F 40 M3 60 M3 6 6 Z For M5 cap screw 314

6 Heavy-Duty Goniometer This goniometer allows alignment of a sample using the same rotation center. stainless steel is used as main material and our original fitting technology is used to achieve high rigidity. In the specifications shown in the photo, there are two operating axes: swivel (goniometer) and. The XY axes can be added as required. Table Size Actuator Motion Range Guide Mechanism Reduction Ratio Material Load Capacity Swivel Stage Stage 130mm 130mm 160mm Dove-tail slide Bearing Guides 5 Worm shaft & Worm wheel 1 / One revolution of Handle Wheel 2 / One revolution of Handle Wheel Brass, Stainless Steel 50kg CONTACT TEL: FAX: [ ] info@kohzu.com [URL] 315

7 / Industrial Automation Instruments KZ400 / 600, RSY-150 / 300 XY Stage For Multipurpose Three-Dimensional Measurement KZ400 / KZ600 Series The KZ series is a multipurpose XY stage for shape measurement, image observation, and image processing. The system can be configured with an optional SC-200 motor controller, portal frame, and vibration isolation table. Also an XY stage can be selected from two types: stroke 200 mm (KZ-400) and 300 mm (KZ-600). System Components of Mechanical Unit Motion Range Motorized XY Maximum Speed Linear Stage Ideal Resolution Repeatability Manual Stage Motion Range Weight of XY Stage KZ-400 KZ mm 300mm 40mm / sec 4 m / step (Half-step) 2 m kg 100kg 316

8 Layer Profiling System VertScan The VertScan layer profiling system performs layer structural analysis by generating tomographic images of a specified cutting location from optical microscope images that are obtained by moving sequentially in the vertical direction. Development and Distribution : Ryoka Systems Inc. Specifications of Stage Item Compressed Air Power Saurce Clean Room Response Stage Unit Size Stage Unit Weight Control Rack Unit Size Control Rack Unit Weight X-Y Stage X Valid Stroke Y Valid Stroke Maximum Speed Actuator Stage Resolution Repeatability Z axis Valid Stroke Actuator Z Axis Resolution Jog-Dial Joy-Stick RSY-150 RSY Mpa Tube : Internal diameter 4mm, External diameter 6mm Single-phase 100V 4KVA Response to Class (W) 500 (D) 1400 (H) 1200 (W) 800 (D) 1500 (H) About 200kg About 300kg 570 (W) 750 (D) 1850 (H) 5700 (W) 750 (D) 1850 (H) About 180kg 75mm 150mm 75mm 150mm 10mm / sec Ball screw, Open-loop control 1 m / step 1 m 50mm Grand screw, Open-loop control 1 m / step (Half-step) 100 m / Revolution Hi-speed setting 8000pps, Low-speed setting 200pps Features Super depth measurement A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of flat display panels such as plasma displays. Very weak interference fringe patterns can be captured Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognized, foreign particle locations in multilayer film can be identified. 100 magnification interference is achieved A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult. NSIMAGIK compatible system NSIMAGIK specifications common to various image creation systems and image processing systems are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible. CONTACT TEL: FAX: [ ] info@kohzu.com [URL] 317

9 / Industrial Automation Instruments Various Components Heavy-Duty Goniometer (MAX-G) The MAX-G series of heavy-duty goniometers comprises components with large X-ray diffractometers. Since the MAX-G series supports both horizontal and vertical orientation, various types of equipment can be easily configured. Also an optional encoder can be mounted, and our SC series controllers can be used together for feedback control. RDM-10 large surface diffractometer (SPring-8 BL13XU) A prototype of the MAX-G series is used for the axis of this diffractometer. Custom NASA Diffractometer NZD-1 Custom SPring-8 Diffractometer NZD-2 318

10 Specifications Model Number Diameter (Internal Diameter) Height Size Accuracy Resolution (Full-Step) Repeatability (Measurement Value) Backlash (Measured Value) Eccentricity (Measured Value) wobble Out (Measured Value) Maximum Speed (Full-Step) Load Stiffness (Horizontally) MAX-G mm ( 230) 145mm 15" / 360, 1" / " (1.4") 5" (1"***) 5 m (2 m) 30 rad (15 rad) 10 / sec 2t MAX-G mm ( 350) 172mm 15" / 360, 1" / " (1.4") 5" (1"***) 5 m (3 m) 20 rad (5 rad) 10 / sec 5t MAX-G-800* 800mm ( 400) ** 204mm** 15" / 360, 1" / 1 ** ** 2"** 5"** 5 m** 15 rad** 10 / sec** 5t** Note : Various inspection and measurement methods are used for the specifications of the MAX-G series. These methods are different from those described in the inspection system (P ). Please contact us for details. * The MAX-G-800 specifications are under review. ** These are target values. *** The backlash value is obtained when an SC controller is used. Electrical Specifications Motor PK599-A Limit Switch SS-5GL2 Origin Sensor PM-U24 Near Origin Sensor PM-R24 Connector (For Motor) NJC24 24-RM Connector (For Encoder) NJC20 10-RM Note : Specifications and dimensions are subject to change without prior notice. CONTACT TEL: FAX: [ ] info@kohzu.com [URL] 319